Shutdown lampoly SNF 2009-07-31 21:06:42: Exit load luck outer door did not close.

mtang at snf.stanford.edu mtang at snf.stanford.edu
Mon Aug 3 12:52:52 PDT 2009


Am not sure why, but the problem seems to have cleared itself.  In addition to this error, a few hours later after the system was shutdown, errors 015 and 001 appeared (loadlock purge errors.)   
Ran wafers and no loadlock errors appeared.  However, the He backside purge seems to take a long time to stabilize (about 9 wafers.)  We hope to have someone in on Wednesday to take a look at this.




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