Shutdown lampoly SNF 2009-08-06 17:00:18: He clamp press error

iwjung at snf.stanford.edu iwjung at snf.stanford.edu
Thu Aug 6 17:00:18 PDT 2009


Error 209. He clamp press exceeded soft tolerance. Recipe was holding in step 2. 
Aborted recipe. 
3 Dummy wafers stranded on track and chamber. 
Can't find something in menu to clear wafers or skip step. 




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