Shutdown lampoly SNF 2009-08-06 17:00:18: He clamp press error

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Thu Aug 6 17:48:22 PDT 2009


Aborted the wafer o main chamber and continue running the
rest of the dummy wafers w/out problem. backside he is 6.3sccm




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