Shutdown lampoly SNF 2009-08-06 22:20:11: same problem again

iwjung at snf.stanford.edu iwjung at snf.stanford.edu
Thu Aug 6 22:20:12 PDT 2009


Error  209: Recipe holding in stability step. He clamp press exceeded soft tolerance. Wafers stuck in etch chamber. 




More information about the lampoly-pcs mailing list