Shutdown lampoly SNF 2009-08-06 22:20:11: same problem again

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Aug 7 08:50:51 PDT 2009


Cleared error and resumed process.  Completed the rest of the wafers (10 ??)  with no problems.  
The backside cooling He flow takes several wafers before it stabilizes.  If the problem re-occurs, just clear the error and resume




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