Problem lampoly SNF 2009-08-13 11:12:35: Cassette hitting unload robot arm

nharjee at snf.stanford.edu nharjee at snf.stanford.edu
Thu Aug 13 11:12:35 PDT 2009


On unload of the wafer, the cassette hits the robot arm as it indexes up. Looking at the arm when it is idle, it appears to be off center, which is likely causing the problem.




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