Shutdown lampoly SNF 2009-08-13 15:49:21: holder stuck
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Thu Aug 13 19:28:19 PDT 2009
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Shutdown lampoly SNF 2009-08-13 15:49:21: holder stuck
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Problem lampoly SNF 2009-08-15 08:25:49: extractor arm stuck exiting etch chamber
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Homed load arm and adjusted, load arm at elevator sensor.
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Shutdown lampoly SNF 2009-08-13 15:49:21: holder stuck
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Problem lampoly SNF 2009-08-15 08:25:49: extractor arm stuck exiting etch chamber
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