Problem lampoly SNF 2009-08-15 08:25:49: extractor arm stuck exiting etch chamber

jprovine at snf.stanford.edu jprovine at snf.stanford.edu
Sat Aug 15 08:25:49 PDT 2009


the robot arm became stuck exiting the etch chamber with the first dummy wafer during use.  only dummy wafers in system.  gap measurement seems fine.  we were running recipe 1.




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