Shutdown lampoly SNF 2009-08-17 12:04:59: wafers are still stuck
tura at snf.stanford.edu
tura at snf.stanford.edu
Mon Aug 17 12:05:00 PDT 2009
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Problem lampoly SNF 2009-08-15 08:25:49: extractor arm stuck exiting etch chamber
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Shutdown lampoly SNF 2009-08-17 12:04:59: wafers are still stuck
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Problem lampoly SNF 2009-08-15 08:25:49: extractor arm stuck exiting etch chamber
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Shutdown lampoly SNF 2009-08-17 12:04:59: wafers are still stuck
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