Problem lampoly SNF 2009-08-18 20:09:25: wafer was not loaded

makotom1 at snf.stanford.edu makotom1 at snf.stanford.edu
Tue Aug 18 20:09:26 PDT 2009


when the recipe starts, arm could not take the wafer from load cassette.
376 error ("The initialize task is waiting for the gap...") reported, but I cannnot recover this state.
How can I recover the state?




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