Problem lampoly SNF 2009-08-15 08:25:49: extractor arm stuck exiting etch chamber
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Fri Aug 21 03:30:33 PDT 2009
Previous message:
Problem lampoly SNF 2009-08-15 08:25:49: extractor arm stuck exiting etch chamber
Next message:
Shutdown lampoly SNF 2009-08-17 12:04:59: wafers are still stuck
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
Previous message:
Problem lampoly SNF 2009-08-15 08:25:49: extractor arm stuck exiting etch chamber
Next message:
Shutdown lampoly SNF 2009-08-17 12:04:59: wafers are still stuck
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
More information about the lampoly-pcs mailing list