Problem lampoly SNF 2009-08-21 13:19:32: alerm 68,79; dummy wafer doesn't go to chamber

makotom1 at snf.stanford.edu makotom1 at snf.stanford.edu
Fri Aug 21 13:19:33 PDT 2009


alterm 68, 79 appeared. Gap spacing seems to be not good...
Dummy wafer is staying on the arm.




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