Problem lampoly SNF 2009-08-21 14:33:34: Watch the turbo please

mtang at snf.stanford.edu mtang at snf.stanford.edu
Fri Aug 21 14:33:34 PDT 2009


Just a reminder to watch the turbo pump which seems to get bogged down after a lot of process gas flowing.  The controller is the Pfeiffer TCP 600.  Top speed is 600.  With long etches, it may drop.  It will fault below about 570.  When it starts to drop to 580 or below, let the machine idle without process gas until the turbo recovers.  Then you can proceed. 
Spare pump(s) are being located.




More information about the lampoly-pcs mailing list