Problem lampoly SNF 2009-08-23 22:27:46: Output cassette drive misalign

bchui at snf.stanford.edu bchui at snf.stanford.edu
Sun Aug 23 22:27:47 PDT 2009


Output cassette drive doesn't align with the output arm.  The wafer 'trips' when it's being returned to the output cassette (the cassette rises before the output arm has a chance to let go of the wafer).  In fact, the sixth wafer out skips a slot, i.e. the cassette is probably rising too fast/too much.




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