From eenriquez at snf.stanford.edu Wed Dec 2 09:22:12 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 Dec 2009 09:22:12 -0800 Subject: Shutdown lampoly SNF 2009-12-02 09:22:12: Leaky pump exhaust Message-ID: Process pump exhaust line is leaking. From eenriquez at snf.stanford.edu Wed Dec 2 15:38:04 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 Dec 2009 15:38:04 -0800 Subject: Shutdown lampoly SNF 2009-12-02 09:22:12: Leaky pump exhaust Message-ID: Replaced leaky bellows. Ran 7 wafers using recipe 1. Turbo speed drops as low as 585 Hz and recovers to 597 Hz during process. From usha at snf.stanford.edu Wed Dec 9 15:55:22 2009 From: usha at snf.stanford.edu (usha at snf.stanford.edu) Date: Wed, 9 Dec 2009 15:55:22 -0800 Subject: Comment lampoly SNF 2009-12-09 15:55:21: Lampoly Etchrate - Dec 1,2009 Message-ID: Wafers etched on 12/1/09 Recipe 1: 10s BT, 60s ME, 30s OE R Si Loss - 4571A; Unif =1.24% Poly Loss - 5877A; Unif. = 0.55% Resist Loss - 1306A; Unif. = 4.94% Oxide Loss - 380A; Unif. = 3.55% From cbaxter at snf.stanford.edu Wed Dec 9 22:14:18 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 9 Dec 2009 22:14:18 -0800 Subject: Problem lampoly SNF 2009-11-30 19:35:07: Turbo not reaching speed Message-ID: Tighten all the clamps on the forelines, turbo is holding fine. From nharjee at snf.stanford.edu Thu Dec 10 16:55:50 2009 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Thu, 10 Dec 2009 16:55:50 -0800 Subject: Problem lampoly SNF 2009-12-10 16:55:49: Internal counter will overflow Message-ID: Alarm states that internal counter will overflow in 48 hours. System needs to be restarted. From nharjee at snf.stanford.edu Thu Dec 10 17:34:07 2009 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Thu, 10 Dec 2009 17:34:07 -0800 Subject: Comment lampoly SNF 2009-12-10 17:34:06: Turbo down to 530 Hz at end of clean Message-ID: Don't think the turbo issue is solved. From cbaxter at snf.stanford.edu Thu Dec 10 19:25:59 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 10 Dec 2009 19:25:59 -0800 Subject: Problem lampoly SNF 2009-12-10 16:55:49: Internal counter will overflow Message-ID: someone reset the tool.. From nharjee at snf.stanford.edu Fri Dec 11 19:50:15 2009 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Fri, 11 Dec 2009 19:50:15 -0800 Subject: Problem lampoly SNF 2009-12-11 19:50:15: Internal counter will overflow Message-ID: Internal counter will overflow in 17 hours. Someone please reset the tool so it doesn't die over the weekend. This is the second time I've flagged this alarm. From nharjee at snf.stanford.edu Sat Dec 12 03:44:45 2009 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Sat, 12 Dec 2009 03:44:45 -0800 Subject: Comment lampoly SNF 2009-12-12 03:44:45: Prepare for lampoly implosion... Message-ID: ..in 3 hours From shott at snf.stanford.edu Sat Dec 12 10:34:54 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 12 Dec 2009 10:34:54 -0800 Subject: Problem lampoly SNF 2009-12-11 19:50:15: Internal counter will overflow Message-ID: System restarted to clear internal counter before it overflowed. However, both before and after the restart, there is an error message that says something like: Gas box disabled due to pump or scrubber failure. I'm not quite sure what that means or what to do to clear it. It appears as if both the main backing pump, the turbo, and the loadlock pump are all running. One thing that occurs to me: The chlorine sensor was installed in the gas box yesterday .... I wonder whether there was some sort of interlock associated with that? So, at this point, the "gas box disabled" alarm is still on and will not clear. Thanks, John From shott at snf.stanford.edu Sat Dec 12 10:35:07 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 12 Dec 2009 10:35:07 -0800 Subject: Comment lampoly SNF 2009-12-12 03:44:45: Prepare for lampoly implosion... Message-ID: System restarted to clear internal counter before it overflowed. However, both before and after the restart, there is an error message that says something like: Gas box disabled due to pump or scrubber failure. I'm not quite sure what that means or what to do to clear it. It appears as if both the main backing pump, the turbo, and the loadlock pump are all running. One thing that occurs to me: The chlorine sensor was installed in the gas box yesterday .... I wonder whether there was some sort of interlock associated with that? So, at this point, the "gas box disabled" alarm is still on and will not clear. Thanks, John From shott at snf.stanford.edu Sat Dec 12 10:48:25 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 12 Dec 2009 10:48:25 -0800 Subject: Comment lampoly SNF 2009-12-12 10:48:24: Gas box disabled ... my goof. Message-ID: Doh!!! I just realized that the "Gas box disabled" error happens when the tool is not enabled in Coral. Everything is now good to go ... Sorry for the false alarm, John From eenriquez at snf.stanford.edu Mon Dec 14 11:45:44 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Dec 2009 11:45:44 -0800 Subject: Comment lampoly SNF 2009-12-14 11:45:43: Changed the turbo setpoint Message-ID: Changed the turbo speed setpoint from 600 to 400 Hz. Cycled 12 wafers using recipe 99 with no drop in turbo speed. From eenriquez at snf.stanford.edu Mon Dec 14 11:59:43 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Dec 2009 11:59:43 -0800 Subject: Problem lampoly SNF 2009-12-14 11:59:42: Needs process qual Message-ID: Needs a process qual after changing the turbo speed setpoint from 600 to 400 Hz. FYi The turbo currently installed on the system is not the original turbo. The original turbo was defective and could not be rebuilt. The original turbo's controller did not have a speed indicator so we did not know what the speed setting was. 600Hz for the current turbo was the factory setting