Shutdown lampoly SNF 2009-12-02 09:22:12: Leaky pump exhaust

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Dec 2 15:38:04 PST 2009


Replaced leaky bellows.  Ran 7 wafers using recipe 1.  Turbo speed drops as low as 585 Hz and recovers to 597 Hz  during process.




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