Comment lampoly SNF 2009-12-09 15:55:21: Lampoly Etchrate - Dec 1,2009

usha at snf.stanford.edu usha at snf.stanford.edu
Wed Dec 9 15:55:22 PST 2009


Wafers etched on 12/1/09
Recipe 1:  10s BT, 60s ME, 30s OE
R
Si Loss - 4571A; Unif =1.24%
Poly Loss - 5877A; Unif. = 0.55%
Resist Loss - 1306A; Unif. = 4.94%
Oxide Loss - 380A; Unif. = 3.55%




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