Comment lampoly SNF 2009-12-14 11:45:43: Changed the turbo setpoint

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Dec 14 11:45:44 PST 2009


Changed the turbo speed setpoint from 600 to 400 Hz.  Cycled 12 wafers using recipe 99 with no drop in turbo speed.  




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