Problem lampoly SNF 2009-02-22 07:33:03: Etch rate problem

mtang at snf.stanford.edu mtang at snf.stanford.edu
Sun Feb 22 07:33:03 PST 2009


Keyogran reports a 5X increase in etch rates on wafers and recipe she has well-characterized.  Will check system on Monday.  In the meantime, it is not recommended to use lampoly for critical etches.




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