Comment lampoly SNF 2009-02-25 18:34:28: re: too fast etch rate

bchui at snf.stanford.edu bchui at snf.stanford.edu
Wed Feb 25 18:34:29 PST 2009


It seems to etch a bit fast (etches Si at close to 4000A/min), but the C2F6 flow was at .2, probably just MFC calib noise.




More information about the lampoly-pcs mailing list