Comment lampoly SNF 2009-02-25 18:34:28: re: too fast etch rate

mtang at snf.stanford.edu mtang at snf.stanford.edu
Fri Feb 27 08:00:38 PST 2009


Followed up with bchui, who says on further analysis, the lampoly looks fine.  To paraphrase his responses:
"I was...  using 0.5um lines patterned on 0.7um 955 resist (on plain Si wafers).  Actually the etch went beautifully--nice selectivity, good sidewalls, etc,.... I etched 1.2um in 210 sec, i.e. 3428A/min, which is just right for Si!"




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