From mtang at snf.stanford.edu Mon Jan 5 15:44:26 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 5 Jan 2009 15:44:26 -0800 Subject: Comment lampoly SNF 2009-01-05 15:44:25: Turbo update Message-ID: As per Elmer/Mike via John: A new turbo for stsetch is due in shortly, so the turbo borrowed from lampoly was returned. There is, however, some difficulty in alignment of the turbo assembly which was apparent as a leak. There also appears to be a problem with the heater. Elmer and Mike plan to work on this first thing Tuesday morning. From mtang at snf.stanford.edu Tue Jan 6 16:28:45 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 6 Jan 2009 16:28:45 -0800 Subject: Shutdown lampoly SNF 2008-12-15 10:03:19: Turbo pump Message-ID: Elmer and Mike replaced the turbo this morning. Rate of rise is good. Other things popped up (electrode chiller connector loose, process cooling water had not yet been turned on inb the fingerwall, chamber heater breaker kicked off, RF power connectors were loose.) But thanks to Elmer, Mike, Jim H, and Gary S., these were resolved and the system is functional. Quals are underway. From mtang at snf.stanford.edu Tue Jan 6 17:46:49 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 6 Jan 2009 17:46:49 -0800 Subject: Comment lampoly SNF 2009-01-06 17:46:48: Qual results Message-ID: Etch depth for standard recipe 1 is 4847 A with 1% uniformity. Etch selectivity of sc silicon to resist is 3.75. The resist, however, was a little burned around the edged, about 1/2 cm in. Etch depth is also on the high side of acceptable. These are both not unusual in a system that has been at atmosphere for a few weeks. I'm going to cycle wafers for now. From mtang at snf.stanford.edu Wed Jan 7 16:56:37 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 7 Jan 2009 16:56:37 -0800 Subject: Problem lampoly SNF 2009-01-07 16:56:36: Update Message-ID: The turbopump was kicking off and it turned out there was another set of cooling water that had not been turned on (so it was overheating.) After cooling the turbo off and restarting, ran about 30 wafers on recipe #1 with 2 minute main etch. This was an attempt to see if the resist burning observed on the quals might have been due to chamber conditioning. Another qual run also shows burned resist around the edges. The etch depth and uniformity are fine, as is the selectivity to resist, but for the burning. The wafers appear to be well-centered on the chuck, as gaged by the clamp ring shadow. (Non-centered on the chuck was thought to be the cause of this problem last time.) I'm leaving the system in yellow. It is usable, but I would caution that the etch profile in the burned areas may very well not be up to par, based on past history. We'll continue working on this. From shott at snf.stanford.edu Wed Jan 7 19:35:51 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 7 Jan 2009 19:35:51 -0800 Subject: Comment lampoly SNF 2009-01-05 15:44:25: Turbo update Message-ID: Mike and Elmer were able to resolve the turbo alignment issued and also found a cable that was ajar resulting in the electrode chiller problem. So, at this point, I believe the tool is functiona and ready for process qualification. John From shott at snf.stanford.edu Wed Jan 7 19:36:02 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 7 Jan 2009 19:36:02 -0800 Subject: Comment lampoly SNF 2008-10-30 18:05:19: A couple more things... Message-ID: From shott at snf.stanford.edu Wed Jan 7 19:36:16 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 7 Jan 2009 19:36:16 -0800 Subject: Comment lampoly SNF 2008-10-22 10:04:44: alarm on first dummy Message-ID: From shott at snf.stanford.edu Wed Jan 7 19:36:21 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 7 Jan 2009 19:36:21 -0800 Subject: Comment lampoly SNF 2008-10-31 14:44:13: Update Message-ID: From shott at snf.stanford.edu Wed Jan 7 19:36:45 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 7 Jan 2009 19:36:45 -0800 Subject: Comment lampoly SNF 2008-11-05 00:44:48: alarm cleared Message-ID: To the archives ... John From shott at snf.stanford.edu Wed Jan 7 19:36:54 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 7 Jan 2009 19:36:54 -0800 Subject: Comment lampoly SNF 2008-11-12 16:38:01: Etch rate test Message-ID: To the archives ... John From shott at snf.stanford.edu Wed Jan 7 19:37:07 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 7 Jan 2009 19:37:07 -0800 Subject: Comment lampoly SNF 2008-11-12 16:52:01: Update on process problem Message-ID: From shott at snf.stanford.edu Wed Jan 7 19:37:26 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 7 Jan 2009 19:37:26 -0800 Subject: Comment lampoly SNF 2008-11-13 19:03:47: Rotation adjusted Message-ID: To the archives ... John From shott at snf.stanford.edu Wed Jan 7 19:37:54 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Wed, 7 Jan 2009 19:37:54 -0800 Subject: Comment lampoly SNF 2008-12-06 10:44:51: Wafer transfer Message-ID: To the archives ... John From mtang at snf.stanford.edu Thu Jan 8 17:47:51 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 8 Jan 2009 17:47:51 -0800 Subject: Comment lampoly SNF 2009-01-08 17:47:50: Checked MFC cal and rate of rise Message-ID: Cooled chamber and electrode down to 25 C. Rate of rise was 0.13 mt/min. MFC flow check done for Cl2, HBr, O2 and C2F6 using gas flows as in Recipe #1. Offsets were: Gas Before After Cl2 -1.13 -0.99 HBr -3.80 -2.22 O2 -0.17 -0.16 C2F6 -3.41 -4.24 These offsets are well within the acceptable values of 5% of the full scale range of these MFC's, so gases are OK. Heating the system back up to temperature. Still no obvious causes of the resist burning on wafer edges. From yeh at snf.stanford.edu Tue Jan 13 13:27:54 2009 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Tue, 13 Jan 2009 13:27:54 -0800 Subject: Shutdown lampoly SNF 2009-01-13 13:27:53: chiller not working Message-ID: From mtang at snf.stanford.edu Tue Jan 13 16:05:21 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 13 Jan 2009 16:05:21 -0800 Subject: Comment lampoly SNF 2009-01-13 16:05:20: Update Message-ID: As per Elmer, it appears that the chiller pump has died, although it is not clear why this did not appear as an electrode temperature control problem (it was still at the setpoint of 60 C) and processing could still take place. Elmer and Mike hope to replace the pump tomorrow (Wednesday.) From mdickey at snf.stanford.edu Wed Jan 14 06:25:05 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 14 Jan 2009 06:25:05 -0800 Subject: Problem lampoly SNF 2009-01-14 06:25:05: No HBR Message-ID: No HBR to be used due to leak at the bottle From eenriquez at snf.stanford.edu Wed Jan 14 10:36:09 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 14 Jan 2009 10:36:09 -0800 Subject: Shutdown lampoly SNF 2009-01-13 13:27:53: chiller not working Message-ID: Replaced the lower chiller water pump. Processed two wafers with no problems. From eenriquez at snf.stanford.edu Wed Jan 14 10:36:38 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 14 Jan 2009 10:36:38 -0800 Subject: Comment lampoly SNF 2009-01-13 16:05:20: Update Message-ID: Completed the repair. From eenriquez at snf.stanford.edu Wed Jan 14 10:40:47 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 14 Jan 2009 10:40:47 -0800 Subject: Comment lampoly SNF 2009-01-14 10:40:46: HBr update Message-ID: Ordered new gas cylinder "pigtail" manifold. Manifold will be ready before noon tomorrow. HBr should be available by 3 pm tomorrow From mtang at snf.stanford.edu Wed Jan 14 11:23:40 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 14 Jan 2009 11:23:40 -0800 Subject: Shutdown lampoly SNF 2009-01-14 11:23:40: No HBr Message-ID: Apologies, a leak was found at the cylinder. The replacement parts are due in tomorrow. The system is usable for non-HBr recipes, but I'm shutting it down because as far as I know, no one uses non-HBr recipes. Contact me if you need this for a non-HBr recipe in the next 24 hours or so. From eenriquez at snf.stanford.edu Thu Jan 15 15:03:51 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 15 Jan 2009 15:03:51 -0800 Subject: Comment lampoly SNF 2009-01-15 15:03:50: Update HBr Message-ID: Installed new gas cylinder pigtail. Having a problem sealing the gas cylinder fitting (DISS) using a nickel gasket. Will switch back to a teflon gasket (Kel-F) tomorrow. From eenriquez at snf.stanford.edu Fri Jan 16 11:00:48 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 16 Jan 2009 11:00:48 -0800 Subject: Shutdown lampoly SNF 2009-01-14 11:23:40: No HBr Message-ID: HBr is now available From eenriquez at snf.stanford.edu Fri Jan 16 11:01:04 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 16 Jan 2009 11:01:04 -0800 Subject: Comment lampoly SNF 2009-01-15 15:03:50: Update HBr Message-ID: HBr is now available. From eenriquez at snf.stanford.edu Fri Jan 16 11:01:20 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 16 Jan 2009 11:01:20 -0800 Subject: Problem lampoly SNF 2009-01-14 06:25:05: No HBR Message-ID: Archived From eenriquez at snf.stanford.edu Fri Jan 16 11:01:29 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 16 Jan 2009 11:01:29 -0800 Subject: Comment lampoly SNF 2009-01-14 10:40:46: HBr update Message-ID: Archived From mdickey at snf.stanford.edu Tue Jan 20 13:29:15 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 20 Jan 2009 13:29:15 -0800 Subject: Shutdown lampoly SNF 2009-01-20 13:29:14: Chiller leak Message-ID: The chiller is leaking too much to be run at the moment. Going to investigate now From eenriquez at snf.stanford.edu Wed Jan 21 08:10:03 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Jan 2009 08:10:03 -0800 Subject: Shutdown lampoly SNF 2009-01-20 13:29:14: Chiller leak Message-ID: Large leak was not a leak but water that came out of the reservoir vent line when it is over filled. Water pump still has a small leak at the shaft seal. New pump should be here in about 1 week. From mdickey at snf.stanford.edu Wed Jan 21 09:17:12 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 21 Jan 2009 09:17:12 -0800 Subject: Comment lampoly SNF 2009-01-21 09:17:11: Chiller Message-ID: Thei chiller is operational now. Cycled 3 wafers with the current loaded recipe with no problems From lwchang at snf.stanford.edu Tue Jan 27 10:24:58 2009 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Tue, 27 Jan 2009 10:24:58 -0800 Subject: Problem lampoly SNF 2009-01-27 10:24:57: water chiller failed Message-ID: From eenriquez at snf.stanford.edu Tue Jan 27 14:41:57 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 27 Jan 2009 14:41:57 -0800 Subject: Comment lampoly SNF 2009-01-27 14:41:57: Update water chiller Message-ID: Failed for low water resistivity. Drained and refilled coolant. Also replaced de-ioning filter cartridges. Now waiting for resistivity to come up to normal. From mtang at snf.stanford.edu Wed Jan 28 11:30:34 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 28 Jan 2009 11:30:34 -0800 Subject: Shutdown lampoly SNF 2009-01-28 11:30:34: Chiller failure alarm Message-ID: Alarm 184, chiller failure. It looks like the resistivity is low on the chiller and does not reset. From mtang at snf.stanford.edu Wed Jan 28 12:38:47 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 28 Jan 2009 12:38:47 -0800 Subject: Shutdown lampoly SNF 2009-01-28 11:30:34: Chiller failure alarm Message-ID: OK to use for now, as per John and Mary. From eenriquez at snf.stanford.edu Wed Jan 28 16:10:12 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 Jan 2009 16:10:12 -0800 Subject: Problem lampoly SNF 2009-01-27 10:24:57: water chiller failed Message-ID: Replaced water resistivity sensor and changed out the coolant. Now the water resistivity is about 1.9 Mohm @ 66.6 C. From eenriquez at snf.stanford.edu Wed Jan 28 16:10:19 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 Jan 2009 16:10:19 -0800 Subject: Comment lampoly SNF 2009-01-27 14:41:57: Update water chiller Message-ID: Replaced water resistivity sensor and changed out the coolant. Now the water resistivity is about 1.9 Mohm @ 66.6 C. From eenriquez at snf.stanford.edu Wed Jan 28 16:10:37 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 Jan 2009 16:10:37 -0800 Subject: Comment lampoly SNF 2009-01-21 09:17:11: Chiller Message-ID: Archived