From lwchang at snf.stanford.edu Wed Jul 1 17:43:00 2009 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Wed, 1 Jul 2009 17:43:00 -0700 Subject: Problem lampoly SNF 2009-07-01 17:42:59: RF tolerance exceeded during an RF on step Message-ID: During seasoning, several wafers hit error "RF tolerance exceeded during an RF on step". All happened in recipe 1 overetch step (step7). From cbaxter at snf.stanford.edu Wed Jul 1 19:08:20 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 1 Jul 2009 19:08:20 -0700 Subject: Problem lampoly SNF 2009-07-01 17:42:59: RF tolerance exceeded during an RF on step Message-ID: Ran recipe#1 w/out problem From mtang at snf.stanford.edu Thu Jul 2 12:51:31 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 2 Jul 2009 12:51:31 -0700 Subject: Shutdown lampoly SNF 2009-07-02 12:51:30: Clamp broken Message-ID: Checking out reports of high He backside flow. Purged and vented the chamber. The new clamp assembly is broken on one arm. Luckily, I believe we have replacement parts, but it will take some time and skill to repair. From eenriquez at snf.stanford.edu Thu Jul 2 14:41:51 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 2 Jul 2009 14:41:51 -0700 Subject: Comment lampoly SNF 2009-07-02 14:41:51: Update clamp broken Message-ID: Installed the old clamp and replaced broken ceramics. Cleaned the chamber and cycle purged. Need to run a qual From maurice at snf.stanford.edu Thu Jul 2 17:03:29 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 2 Jul 2009 17:03:29 -0700 Subject: Shutdown lampoly SNF 2009-07-02 12:51:30: Clamp broken Message-ID: Needs Qual run After EE repair From maurice at snf.stanford.edu Thu Jul 2 17:05:25 2009 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 2 Jul 2009 17:05:25 -0700 Subject: Problem lampoly SNF 2009-07-02 17:05:25: Needs test after repair Message-ID: jaehlee has asked if he can run ~10 wafers to check system From mtang at snf.stanford.edu Thu Jul 2 17:34:47 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 2 Jul 2009 17:34:47 -0700 Subject: Comment lampoly SNF 2009-07-02 17:34:46: Backside He Message-ID: Looks good! Jae ran some dummies and after about 4-5 wafers, He flow stabilized at about 9 sccm. From matt827657 at snf.stanford.edu Fri Jul 3 09:32:29 2009 From: matt827657 at snf.stanford.edu (matt827657 at snf.stanford.edu) Date: Fri, 3 Jul 2009 09:32:29 -0700 Subject: Problem lampoly SNF 2009-07-03 09:32:28: Exit load lock robot arm stuck Message-ID: running recipe 28 for SiC etch on piece. The robot arm stuck trying to remove carrier wafer. Could not reset from user menu. Please salvage wafer and piece. Holder with J Provines name on it has been left on top of the exit load lock chamber. From cbaxter at snf.stanford.edu Sun Jul 5 09:04:47 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 5 Jul 2009 09:04:47 -0700 Subject: Shutdown lampoly SNF 2009-07-05 09:04:46: Broken clamp Message-ID: Vented chamber and found clamp edge holder broke off (3 holder), noticed the wafer carrier that has four wafer chips clued on the wafer is sticking out to far, suspect this was the cause why the clamp edge holder broke. From eenriquez at snf.stanford.edu Mon Jul 6 13:57:38 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 6 Jul 2009 13:57:38 -0700 Subject: Comment lampoly SNF 2009-07-06 13:57:37: HBr is not available Message-ID: Currently changing the HBr cylinder. Will complete the change tomorrow. From eenriquez at snf.stanford.edu Tue Jul 7 09:18:06 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 7 Jul 2009 09:18:06 -0700 Subject: Comment lampoly SNF 2009-07-06 13:57:37: HBr is not available Message-ID: Completed HBr cylinder change From mtang at snf.stanford.edu Thu Jul 9 17:05:04 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 9 Jul 2009 17:05:04 -0700 Subject: Comment lampoly SNF 2009-07-09 17:05:04: Lam Update Message-ID: Parts are due in, hopefully Monday. In the meantime, the gap spacing and gap limits need to be double checked. From mtang at snf.stanford.edu Sun Jul 12 23:53:33 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sun, 12 Jul 2009 23:53:33 -0700 Subject: Comment lampoly SNF 2009-07-12 23:53:33: Gap check Message-ID: Checked gap on Friday. It looks like it was off by about 6 mm. Not significant for the process, but possibly so for the hardware (thus, the recent damage.) Gap Cal parameter index 256 was changed from 7116 to 6496 (based on 0.62 cm delta). Hard stops still need to be adjusted, especially the upper ones. Mechanical switch position for upper and lower limits need to be adjusted as well. After this, the new ring clamp with clamp ceramics can be installed (hopefully, the ceramics will arrive Monday.) Entrance loadlock door was left open to make it easier to see. Please make sure to manually shut it before pumping down the chamber. Also the electrode temperature needs to be set back up to 60 C. After the installation of the ring and system pump/purge cycle, rate of rise should be done. If all looks good, 20 wafers should be run on recipe 99 and then recipe 1. The He backside flow should be checked: at 6 torr, the flow should be stable at 8-10 sccm. (It may take several wafers to get there.) If all looks good, then an etch rate test/qual should be done. From nharjee at snf.stanford.edu Wed Jul 15 13:11:04 2009 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Wed, 15 Jul 2009 13:11:04 -0700 Subject: Comment lampoly SNF 2009-07-15 13:11:04: Status update please Message-ID: From cbaxter at snf.stanford.edu Wed Jul 15 19:38:38 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 15 Jul 2009 19:38:38 -0700 Subject: Comment lampoly SNF 2009-07-15 19:38:36: Gap Cal Message-ID: Gap the clearance should be at 8.300cm when load or exit arm are loading and unload a wafer from the main chamber, right now the gap will only drive to up position at 7.900cm. Troubleshooting the problem and also we only have 3 inner clamp retainer, can't find the other 3. From eenriquez at snf.stanford.edu Fri Jul 17 15:34:50 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 17 Jul 2009 15:34:50 -0700 Subject: Comment lampoly SNF 2009-07-17 15:34:49: Update Message-ID: Vendor did not work on the system because of the missing part. Need to get the part number for the clamp retainer from Lam From mtang at snf.stanford.edu Mon Jul 20 16:40:24 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 20 Jul 2009 16:40:24 -0700 Subject: Comment lampoly SNF 2009-07-20 16:40:23: Update Message-ID: Parts were ordered this morning and picked up this afternoon. However, the system is locked up at the moment (during the automatic vent process.) Might need to reboot the system. Clamp parts need to be installed. Gap height should be verified. Hard and soft stops should be double checked. Then, we should be hopefully ready to go. From usha at snf.stanford.edu Tue Jul 21 11:34:14 2009 From: usha at snf.stanford.edu (usha at snf.stanford.edu) Date: Tue, 21 Jul 2009 11:34:14 -0700 Subject: Comment lampoly SNF 2009-07-21 11:34:14: Status Message-ID: Mary installed parts and checked gap. Looked good. Cycled 6 wafers with no plasma and only He. No issues. Checked backside He at 6T and 8T. He pressure and flow fluctuated on all 6 wafers. Checked using recipe 99. 1st wafer ahad backside He error - had to abort recipe after 30s plama on. 2nd wafer no erro but had backside He fluctuations. All otehr parameters were stable. Recipe ran without problem. Thrd wafer with recipe 99 - Backside He flow stabilized at 6.2T and 8 sccm. Other parameters also stable. Recipe aborted at ~270s for turbo error. Atte,pted toc lear alarm. Wafer came out alam persisted in the next wafer also From mtang at snf.stanford.edu Tue Jul 21 15:02:02 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 21 Jul 2009 15:02:02 -0700 Subject: Shutdown lampoly SNF 2009-07-05 09:04:46: Broken clamp Message-ID: Clamp replaced and gap calibrated. Limit switches all adjusted. Wafers are being run now. The backside helium cooling problem which strikes the first several wafers still exists, but after a few wafers, the backside controls nicely. The turbo seems to slow after long etches (Usha observed after 3 wafers on recipe 99 that the turbo kicked off.) So, please use with caution. For the typical shorter etches (like recipe 1), the turbo recovers between wafers. Longer etches on consecutive wafers may result in the turbo slowing down to the extent it shuts off to protect itself. The process will stop and your wafer may then be stuck inside -- if this happens, shutdown the system. (We need to investigate further.) Etch qualification has not yet been done (should be done in the morning). System should be OK to use, but be aware of the turbo issue (you can see the number on the top of the system TCP-600 module - top speed is 600) and the initial He backside cooling problem. From mtang at snf.stanford.edu Tue Jul 21 15:02:14 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 21 Jul 2009 15:02:14 -0700 Subject: Problem lampoly SNF 2009-07-21 15:02:14: OK to use, with caution Message-ID: Clamp replaced and gap calibrated. Limit switches all adjusted. Wafers are being run now. The backside helium cooling problem which strikes the first several wafers still exists, but after a few wafers, the backside controls nicely. The turbo seems to slow after long etches (Usha observed after 3 wafers on recipe 99 that the turbo kicked off.) So, please use with caution. For the typical shorter etches (like recipe 1), the turbo recovers between wafers. Longer etches on consecutive wafers may result in the turbo slowing down to the extent it shuts off to protect itself. The process will stop and your wafer may then be stuck inside -- if this happens, shutdown the system. (We need to investigate further.) Etch qualification has not yet been done (should be done in the morning). System should be OK to use, but be aware of the turbo issue (you can see the number on the top of the system TCP-600 module - top speed is 600) and the initial He backside cooling problem. From usha at snf.stanford.edu Wed Jul 22 11:07:07 2009 From: usha at snf.stanford.edu (usha at snf.stanford.edu) Date: Wed, 22 Jul 2009 11:07:07 -0700 Subject: Comment lampoly SNF 2009-07-22 11:07:07: Qual Data Message-ID: Chamber leak rate - 0.23mT/min. Gas Cal Data (gas-flow rate, sccm/ cal error, sccm): Cl2 - 40.0 / -0.73; HBr - 100 / -2.91; O2 - 5.0/ -0.22; SF6 - 100/ -4.99; He - 50.0/ -3.22; C2F6 - 100/ -3.84; N2 - 25.0 / -1.4. Ran recipe 1 on 5 wafers including patterned Si wafer - After 3 wfrs backside He stabilized to 6.2-6.3T; Flow = 8 sccm. No reticluation r`on resist wafer. Resist loss with recipe 1 = 1478A; range = 69A. Need to meas Si loss. From usha at snf.stanford.edu Thu Jul 23 15:09:36 2009 From: usha at snf.stanford.edu (usha at snf.stanford.edu) Date: Thu, 23 Jul 2009 15:09:36 -0700 Subject: Comment lampoly SNF 2009-07-23 15:09:35: Si Etch Depth Message-ID: Recipe 1 (20s BT+ 60s ME+30s OE) Si etch depth average 482nm (4820A); Range = 18nm (180A) From filip at snf.stanford.edu Thu Jul 23 19:33:47 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Thu, 23 Jul 2009 19:33:47 -0700 Subject: Problem lampoly SNF 2009-07-23 19:33:47: RF hard tolerance Message-ID: With 90sec etch, alarm goes off every 2nd wafer (Turbo also falls below 570Hz). Needed to pause each 2 wafers for turbo to recover. From filip at snf.stanford.edu Thu Jul 23 19:35:24 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Thu, 23 Jul 2009 19:35:24 -0700 Subject: Comment lampoly SNF 2009-07-23 19:35:24: etch rate Message-ID: BT:10sec ME:80sec OE:0 Etched 430nm of silicon, or 320nm/min. From eenriquez at snf.stanford.edu Fri Jul 24 10:36:35 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 24 Jul 2009 10:36:35 -0700 Subject: Shutdown lampoly SNF 2009-07-24 10:36:34: Wafer stuck in chamber Message-ID: Started the chamber cycle purge From yeh at snf.stanford.edu Fri Jul 24 13:08:07 2009 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Fri, 24 Jul 2009 13:08:07 -0700 Subject: Comment lampoly SNF 2009-07-24 13:08:06: re: wafer stuck in chamber Message-ID: Mary remove the wafer from the chamber. The wafer was shattered and seemed to be offset from the wafer chuck before being shattered. Chamber was wiped down and now going through 20 purge cycles. Checked the alarm log and it was not clear why the wafer got stuck in the first place. From eenriquez at snf.stanford.edu Fri Jul 24 14:25:30 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 24 Jul 2009 14:25:30 -0700 Subject: Shutdown lampoly SNF 2009-07-24 10:36:34: Wafer stuck in chamber Message-ID: Richard conditioned the chamber after Mary removed broken wafer and wiped down the chamber. Had a problem with He pressure stability after the first 2 wafers but subsequent wafers went through OK. From eenriquez at snf.stanford.edu Fri Jul 24 14:25:39 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 24 Jul 2009 14:25:39 -0700 Subject: Comment lampoly SNF 2009-07-24 13:08:06: re: wafer stuck in chamber Message-ID: Richard conditioned the chamber after Mary removed broken wafer and wiped down the chamber. Had a problem with He pressure stability after the first 2 wafers but subsequent wafers went through OK. From braynal at snf.stanford.edu Fri Jul 24 18:08:56 2009 From: braynal at snf.stanford.edu (braynal at snf.stanford.edu) Date: Fri, 24 Jul 2009 18:08:56 -0700 Subject: Problem lampoly SNF 2009-07-24 18:08:56: Message-ID: exit load lock outer door closed sensor failed. Wafer stuck inside, can it be saved? From braynal at snf.stanford.edu Fri Jul 24 18:10:45 2009 From: braynal at snf.stanford.edu (braynal at snf.stanford.edu) Date: Fri, 24 Jul 2009 18:10:45 -0700 Subject: Shutdown lampoly SNF 2009-07-24 18:10:44: Wafer stuck Message-ID: exit door did not open and wafer is stuck inside From cbaxter at snf.stanford.edu Sun Jul 26 20:14:39 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 26 Jul 2009 20:14:39 -0700 Subject: Shutdown lampoly SNF 2009-07-24 18:10:44: Wafer stuck Message-ID: Recovered wafer from exit load and adjusted exit outter door. From cbaxter at snf.stanford.edu Sun Jul 26 20:14:44 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 26 Jul 2009 20:14:44 -0700 Subject: Problem lampoly SNF 2009-07-24 18:08:56: Message-ID: From eenriquez at snf.stanford.edu Mon Jul 27 09:25:44 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 27 Jul 2009 09:25:44 -0700 Subject: Comment lampoly SNF 2009-06-23 14:50:47: Update bad clamping Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jul 27 09:25:54 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 27 Jul 2009 09:25:54 -0700 Subject: Comment lampoly SNF 2009-06-22 15:04:29: Update burning resist Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jul 27 09:26:01 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 27 Jul 2009 09:26:01 -0700 Subject: Comment lampoly SNF 2009-07-17 15:34:49: Update Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jul 27 09:26:14 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 27 Jul 2009 09:26:14 -0700 Subject: Comment lampoly SNF 2009-06-18 10:16:37: Update He press Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jul 27 09:26:52 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 27 Jul 2009 09:26:52 -0700 Subject: Comment lampoly SNF 2009-07-02 14:41:51: Update clamp broken Message-ID: Archived From usha at snf.stanford.edu Mon Jul 27 10:00:38 2009 From: usha at snf.stanford.edu (usha at snf.stanford.edu) Date: Mon, 27 Jul 2009 10:00:38 -0700 Subject: Comment lampoly SNF 2009-07-27 10:00:37: Backside He Message-ID: Tried to run 4 wafers using recipe 1/2. Backside He did nto stabilize. From braynal at snf.stanford.edu Mon Jul 27 20:04:30 2009 From: braynal at snf.stanford.edu (braynal at snf.stanford.edu) Date: Mon, 27 Jul 2009 20:04:30 -0700 Subject: Shutdown lampoly SNF 2009-07-27 20:04:30: wafer stuck Message-ID: Alarm reads: wafer not sensed at exit cassette. Arm came out without wafer From eenriquez at snf.stanford.edu Tue Jul 28 11:25:54 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 28 Jul 2009 11:25:54 -0700 Subject: Shutdown lampoly SNF 2009-07-27 20:04:30: wafer stuck Message-ID: Opened the chamber and recovered the user's wafer. Cycle purged chamber and ran 6 conditioning wafers. From usha at snf.stanford.edu Wed Jul 29 12:58:17 2009 From: usha at snf.stanford.edu (usha at snf.stanford.edu) Date: Wed, 29 Jul 2009 12:58:17 -0700 Subject: Problem lampoly SNF 2009-07-29 12:58:16: Wafer stuck in chamber Message-ID: Wafer stuck in chamber; no alarms; recipe completed and unload action took place but wafer did not come out. must be stuck in chamber. From usha at snf.stanford.edu Wed Jul 29 12:58:57 2009 From: usha at snf.stanford.edu (usha at snf.stanford.edu) Date: Wed, 29 Jul 2009 12:58:57 -0700 Subject: Shutdown lampoly SNF 2009-07-29 12:58:57: Wafer stuck in chamber Message-ID: Broken? From mdickey at snf.stanford.edu Wed Jul 29 14:03:43 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 29 Jul 2009 14:03:43 -0700 Subject: Comment lampoly SNF 2009-07-29 14:03:43: Recovered wafer Message-ID: afer recovered. Need to cycle wafers From tura at snf.stanford.edu Wed Jul 29 18:31:41 2009 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Wed, 29 Jul 2009 18:31:41 -0700 Subject: Comment lampoly SNF 2009-07-29 18:31:41: Etch rate 30% less Message-ID: I use HBr only recipe (#25), and I found that silicon etch rate is about 30% less than what it always was. From eenriquez at snf.stanford.edu Wed Jul 29 19:08:21 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 29 Jul 2009 19:08:21 -0700 Subject: Shutdown lampoly SNF 2009-07-29 12:58:57: Wafer stuck in chamber Message-ID: Ran 8 conditioning wafers. No problems. From sbasumal at snf.stanford.edu Thu Jul 30 19:19:15 2009 From: sbasumal at snf.stanford.edu (sbasumal at snf.stanford.edu) Date: Thu, 30 Jul 2009 19:19:15 -0700 Subject: Problem lampoly SNF 2009-07-30 19:19:14: wafers stuck... Message-ID: ..says shuttle vacuum sensor failed From cbaxter at snf.stanford.edu Thu Jul 30 20:00:23 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 30 Jul 2009 20:00:23 -0700 Subject: Problem lampoly SNF 2009-07-30 19:19:14: wafers stuck... Message-ID: Recovered wafer on main chamber and adjusted load arm vacuum switch. From eenriquez at snf.stanford.edu Fri Jul 31 07:37:52 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 31 Jul 2009 07:37:52 -0700 Subject: Problem lampoly SNF 2009-07-29 12:58:16: Wafer stuck in chamber Message-ID: Mike recovered the wafer From eenriquez at snf.stanford.edu Fri Jul 31 07:38:05 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 31 Jul 2009 07:38:05 -0700 Subject: Comment lampoly SNF 2009-07-29 14:03:43: Recovered wafer Message-ID: Archived From eenriquez at snf.stanford.edu Fri Jul 31 07:38:37 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 31 Jul 2009 07:38:37 -0700 Subject: Comment lampoly SNF 2009-07-15 19:38:36: Gap Cal Message-ID: Archived From eenriquez at snf.stanford.edu Fri Jul 31 07:39:01 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 31 Jul 2009 07:39:01 -0700 Subject: Comment lampoly SNF 2009-06-23 22:11:16: Gap Check Message-ID: Archived From eenriquez at snf.stanford.edu Fri Jul 31 07:39:17 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 31 Jul 2009 07:39:17 -0700 Subject: Comment lampoly SNF 2009-06-24 10:32:04: Update Message-ID: Archived From eenriquez at snf.stanford.edu Fri Jul 31 07:39:47 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 31 Jul 2009 07:39:47 -0700 Subject: Problem lampoly SNF 2009-07-02 17:05:25: Needs test after repair Message-ID: Archived From eenriquez at snf.stanford.edu Fri Jul 31 07:40:02 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 31 Jul 2009 07:40:02 -0700 Subject: Comment lampoly SNF 2009-07-09 17:05:04: Lam Update Message-ID: Archived From eenriquez at snf.stanford.edu Fri Jul 31 07:40:28 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 31 Jul 2009 07:40:28 -0700 Subject: Comment lampoly SNF 2009-06-22 19:43:34: Bad clamping? Message-ID: Archived From eenriquez at snf.stanford.edu Fri Jul 31 07:40:50 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 31 Jul 2009 07:40:50 -0700 Subject: Comment lampoly SNF 2009-07-20 16:40:23: Update Message-ID: Archived From tura at snf.stanford.edu Fri Jul 31 21:06:42 2009 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Fri, 31 Jul 2009 21:06:42 -0700 Subject: Shutdown lampoly SNF 2009-07-31 21:06:42: Exit load luck outer door did not close. Message-ID: I was running dummy wafers and got the error. Why does this keep happening?