Problem lampoly SNF 2009-07-01 17:42:59: RF tolerance exceeded during an RF on step

lwchang at snf.stanford.edu lwchang at snf.stanford.edu
Wed Jul 1 17:43:00 PDT 2009


During seasoning, several wafers hit error "RF tolerance exceeded during an RF on step". All happened in recipe 1 overetch step (step7).




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