Comment lampoly SNF 2009-07-15 19:38:36: Gap Cal

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Wed Jul 15 19:38:38 PDT 2009


Gap the clearance should be at 8.300cm when load or exit
arm are loading and unload a wafer from the main chamber,
right now the gap will only drive to up position at 7.900cm.
Troubleshooting the problem and also we only have 3 inner
clamp retainer, can't find the other 3.  




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