Comment lampoly SNF 2009-07-23 15:09:35: Si Etch Depth

usha at snf.stanford.edu usha at snf.stanford.edu
Thu Jul 23 15:09:36 PDT 2009


Recipe 1 (20s BT+ 60s ME+30s OE) Si etch depth average 
482nm (4820A); Range = 18nm (180A)




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