Shutdown lampoly SNF 2009-07-24 10:36:34: Wafer stuck in chamber

eenriquez at eenriquez at
Fri Jul 24 14:25:30 PDT 2009

Richard conditioned the chamber after Mary removed broken wafer and wiped down the chamber.  Had a problem with He pressure stability after the first 2 wafers but subsequent wafers went through OK.

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