July 2009 Archives by date

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Starting: Wed Jul 1 17:43:00 PDT 2009
Ending: Fri Jul 31 21:06:42 PDT 2009
Messages: 57

• Problem lampoly SNF 2009-07-01 17:42:59: RF tolerance exceeded during an RF on step   lwchang at snf.stanford.edu
• Problem lampoly SNF 2009-07-01 17:42:59: RF tolerance exceeded during an RF on step   cbaxter at snf.stanford.edu
• Shutdown lampoly SNF 2009-07-02 12:51:30: Clamp broken   mtang at snf.stanford.edu
• Comment lampoly SNF 2009-07-02 14:41:51: Update clamp broken   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2009-07-02 12:51:30: Clamp broken   maurice at snf.stanford.edu
• Problem lampoly SNF 2009-07-02 17:05:25: Needs test after repair   maurice at snf.stanford.edu
• Comment lampoly SNF 2009-07-02 17:34:46: Backside He   mtang at snf.stanford.edu
• Problem lampoly SNF 2009-07-03 09:32:28: Exit load lock robot arm stuck   matt827657 at snf.stanford.edu
• Shutdown lampoly SNF 2009-07-05 09:04:46: Broken clamp   cbaxter at snf.stanford.edu
• Comment lampoly SNF 2009-07-06 13:57:37: HBr is not available   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-07-06 13:57:37: HBr is not available   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-07-09 17:05:04: Lam Update   mtang at snf.stanford.edu
• Comment lampoly SNF 2009-07-12 23:53:33: Gap check   mtang at snf.stanford.edu
• Comment lampoly SNF 2009-07-15 13:11:04: Status update please   nharjee at snf.stanford.edu
• Comment lampoly SNF 2009-07-15 19:38:36: Gap Cal   cbaxter at snf.stanford.edu
• Comment lampoly SNF 2009-07-17 15:34:49: Update   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-07-20 16:40:23: Update   mtang at snf.stanford.edu
• Comment lampoly SNF 2009-07-21 11:34:14: Status   usha at snf.stanford.edu
• Shutdown lampoly SNF 2009-07-05 09:04:46: Broken clamp   mtang at snf.stanford.edu
• Problem lampoly SNF 2009-07-21 15:02:14: OK to use, with caution   mtang at snf.stanford.edu
• Comment lampoly SNF 2009-07-22 11:07:07: Qual Data   usha at snf.stanford.edu
• Comment lampoly SNF 2009-07-23 15:09:35: Si Etch Depth   usha at snf.stanford.edu
• Problem lampoly SNF 2009-07-23 19:33:47: RF hard tolerance   filip at snf.stanford.edu
• Comment lampoly SNF 2009-07-23 19:35:24: etch rate   filip at snf.stanford.edu
• Shutdown lampoly SNF 2009-07-24 10:36:34: Wafer stuck in chamber   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-07-24 13:08:06: re: wafer stuck in chamber   yeh at snf.stanford.edu
• Shutdown lampoly SNF 2009-07-24 10:36:34: Wafer stuck in chamber   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-07-24 13:08:06: re: wafer stuck in chamber   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2009-07-24 18:08:56:   braynal at snf.stanford.edu
• Shutdown lampoly SNF 2009-07-24 18:10:44: Wafer stuck   braynal at snf.stanford.edu
• Shutdown lampoly SNF 2009-07-24 18:10:44: Wafer stuck   cbaxter at snf.stanford.edu
• Problem lampoly SNF 2009-07-24 18:08:56:   cbaxter at snf.stanford.edu
• Comment lampoly SNF 2009-06-23 14:50:47: Update bad clamping   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-06-22 15:04:29: Update burning resist   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-07-17 15:34:49: Update   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-06-18 10:16:37: Update He press   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-07-02 14:41:51: Update clamp broken   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-07-27 10:00:37: Backside He   usha at snf.stanford.edu
• Shutdown lampoly SNF 2009-07-27 20:04:30: wafer stuck   braynal at snf.stanford.edu
• Shutdown lampoly SNF 2009-07-27 20:04:30: wafer stuck   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2009-07-29 12:58:16: Wafer stuck in chamber   usha at snf.stanford.edu
• Shutdown lampoly SNF 2009-07-29 12:58:57: Wafer stuck in chamber   usha at snf.stanford.edu
• Comment lampoly SNF 2009-07-29 14:03:43: Recovered wafer   mdickey at snf.stanford.edu
• Comment lampoly SNF 2009-07-29 18:31:41: Etch rate 30% less   tura at snf.stanford.edu
• Shutdown lampoly SNF 2009-07-29 12:58:57: Wafer stuck in chamber   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2009-07-30 19:19:14: wafers stuck...   sbasumal at snf.stanford.edu
• Problem lampoly SNF 2009-07-30 19:19:14: wafers stuck...   cbaxter at snf.stanford.edu
• Problem lampoly SNF 2009-07-29 12:58:16: Wafer stuck in chamber   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-07-29 14:03:43: Recovered wafer   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-07-15 19:38:36: Gap Cal   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-06-23 22:11:16: Gap Check   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-06-24 10:32:04: Update   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2009-07-02 17:05:25: Needs test after repair   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-07-09 17:05:04: Lam Update   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-06-22 19:43:34: Bad clamping?   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-07-20 16:40:23: Update   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2009-07-31 21:06:42: Exit load luck outer door did not close.   tura at snf.stanford.edu

Last message date: Fri Jul 31 21:06:42 PDT 2009
Archived on: Sun Dec 23 09:06:11 PST 2012

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