Shutdown lampoly SNF 2009-06-07 15:53:20: 2" wafer stuck in chamber

tura at snf.stanford.edu tura at snf.stanford.edu
Sun Jun 7 15:53:21 PDT 2009

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I was etching 2" wafers on 4" dummies, one of the 2" wafers went inside the etch chamber but didn't come out.

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