Comment lampoly SNF 2009-06-09 12:33:30: Burns PR

tura at tura at
Tue Jun 9 12:33:30 PDT 2009

It starts burning photoresist after processing 6-7 wafers. At that point the chamber is quite warm to the touch. I waited 30min to cool it down, it still burns photoresist but to a less extent.

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