Problem lampoly SNF 2009-06-16 15:10:54: wafer burning problem

mzhang2 at mzhang2 at
Tue Jun 16 15:10:54 PDT 2009

I ran like 10 dummy wafers using my recipe and all of them are burned. The recipe is just fine because that's the one I used to use. I don't know whether the problem is due to the system stability or not.

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