Shutdown lampoly SNF 2009-06-17 19:19:49: Resist burning

mtang at mtang at
Wed Jun 17 19:19:49 PDT 2009

There was a chiller failure, but John and Elmer topped it off (new chiller installed yesterday and topped off, but level probably dropped as things got flowing for a while.)
Set electrode temp back to 60 C.  Reads 58.5C.  Ran wafers and etch rate test -- but resist still burns.
Am running a boat load of silicon dummies through clean recipe 99 in case the chamber needs additional conditioning (following clean.)  

More information about the lampoly-pcs mailing list