Comment lampoly SNF 2009-06-18 10:16:37: Update He press

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Jun 18 10:16:38 PDT 2009


Ran 3 wafers using recipe 99.  1st wafer, the He press with a setpoint of of 6.0 T varied +/- 1.1 T and alarmed for He press out of tolerance.
The 2nd and 3rd wafer ran without any problems.  The He press was stable at 6.2 +/- 0.1.




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