Comment lampoly SNF 2009-06-23 14:50:47: Update bad clamping

[eenriquez at snf.stanford.edu]

Replaced all the clamp springs, plunger and plunger guide.  Set the chamber temp = 60 C.  Ran 3 wafers.  Backside He flow @ 6 Torr varied from 2 - 20 sccm with an average of around 8 sccm.