Comment lampoly SNF 2009-06-23 14:50:47: Update bad clamping

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Jun 23 14:50:47 PDT 2009


Replaced all the clamp springs, plunger and plunger guide.  Set the chamber temp = 60 C.  Ran 3 wafers.  Backside He flow @ 6 Torr varied from 2 - 20 sccm with an average of around 8 sccm.




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