Comment lampoly SNF 2009-06-24 10:32:04: Update

mtang at mtang at
Wed Jun 24 10:32:04 PDT 2009

There was a turbo error last night, but Elmer cleared and restarted the dummy wafers this morning.  The backside He was controlled at 8 sccm after the 3rd wafer on recipe 99.
Started a cassette of dummies + etch rate wafer at 10:15.  First wafer had high backside He, but by the 3rd wafer had dropped to 8 sccm.  Will post results this afternoon.

More information about the lampoly-pcs mailing list