June 2009 Archives by thread

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Starting: Tue Jun 2 15:20:06 PDT 2009
Ending: Fri Jun 26 17:52:36 PDT 2009
Messages: 43

• Problem lampoly SNF 2009-06-02 15:20:05: not sensing input cassette   lwchang at snf.stanford.edu
  • Problem lampoly SNF 2009-06-02 15:20:05: not sensing input cassette   cbaxter at snf.stanford.edu
• Comment lampoly SNF 2009-03-31 15:06:41: Installed water filter   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-04-06 11:12:09: one cassette missing   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-04-06 16:24:18: found cassette in litho area   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-04-24 09:04:23: Gas#8 changed from Ar to N2   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-05-02 19:09:47: Couldn't find the quartz wafer for clean recipe #99   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-05-07 14:36:56: Backside He is OK   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-05-13 18:12:55: Needs qual   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-05-19 15:11:20: Etch Rate   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2009-06-07 15:53:20: 2" wafer stuck in chamber   tura at snf.stanford.edu
  • Shutdown lampoly SNF 2009-06-07 15:53:20: 2" wafer stuck in chamber   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2009-06-08 17:32:26: The Water Chiller Has Failed!!   tura at snf.stanford.edu
  • Shutdown lampoly SNF 2009-06-08 17:32:26: The Water Chiller Has Failed!!   mdickey at snf.stanford.edu
• Comment lampoly SNF 2009-06-09 12:33:30: Burns PR   tura at snf.stanford.edu
• Shutdown lampoly SNF 2009-06-12 04:27:08: Alarm 184: Water chiller failed   rik at snf.stanford.edu
  • Shutdown lampoly SNF 2009-06-12 04:27:08: Alarm 184: Water chiller failed   mdickey at snf.stanford.edu
• Shutdown lampoly SNF 2009-06-12 15:34:24: Piece left in chamber   rhenn at snf.stanford.edu
  • Shutdown lampoly SNF 2009-06-12 15:34:24: Piece left in chamber   cbaxter at snf.stanford.edu
• Shutdown lampoly SNF 2009-06-13 18:05:46: Water chiller   nvgirish at snf.stanford.edu
  • Shutdown lampoly SNF 2009-06-13 18:05:46: Water chiller   shott at snf.stanford.edu
• Shutdown lampoly SNF 2009-06-14 16:47:00: Water chiller has failed   tura at snf.stanford.edu
  • Shutdown lampoly SNF 2009-06-14 16:47:00: Water chiller has failed   mdickey at snf.stanford.edu
• Problem lampoly SNF 2009-06-16 15:10:54: wafer burning problem   mzhang2 at snf.stanford.edu
  • Problem lampoly SNF 2009-06-16 15:10:54: wafer burning problem   mtang at snf.stanford.edu
• Shutdown lampoly SNF 2009-06-17 19:19:49: Resist burning   mtang at snf.stanford.edu
  • Shutdown lampoly SNF 2009-06-17 19:19:49: Resist burning   cbaxter at snf.stanford.edu
• Problem lampoly SNF 2009-06-17 19:23:00: He backside pressure   mtang at snf.stanford.edu
  • Problem lampoly SNF 2009-06-17 19:23:00: He backside pressure   mtang at snf.stanford.edu
• Comment lampoly SNF 2009-06-18 10:16:37: Update He press   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-06-18 18:03:04: Resist burning   mtang at snf.stanford.edu
• Problem lampoly SNF 2009-06-19 16:25:23: Resist Burning   mtang at snf.stanford.edu
  • Problem lampoly SNF 2009-06-19 16:25:23: Resist Burning   mtang at snf.stanford.edu
• Shutdown lampoly SNF 2009-06-22 09:41:53: Checking clamp   eenriquez at snf.stanford.edu
  • Shutdown lampoly SNF 2009-06-22 09:41:53: Checking clamp   mtang at snf.stanford.edu
• Comment lampoly SNF 2009-06-22 15:04:29: Update burning resist   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-06-22 19:43:34: Bad clamping?   mtang at snf.stanford.edu
• Comment lampoly SNF 2009-06-23 14:50:47: Update bad clamping   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-06-23 17:06:53: Checking clamping   mtang at snf.stanford.edu
• Comment lampoly SNF 2009-06-23 22:11:16: Gap Check   cbaxter at snf.stanford.edu
• Comment lampoly SNF 2009-06-24 10:32:04: Update   mtang at snf.stanford.edu
• Problem lampoly SNF 2009-06-24 15:37:39: Update   mtang at snf.stanford.edu
• Comment lampoly SNF 2009-06-26 17:52:35: recipe 1 status   filip at snf.stanford.edu

Last message date: Fri Jun 26 17:52:36 PDT 2009
Archived on: Sun Dec 23 09:06:11 PST 2012

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