From mtang at snf.stanford.edu Mon Mar 2 09:48:47 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 2 Mar 2009 09:48:47 -0800 Subject: Problem lampoly SNF 2008-12-12 14:48:15: Error 209 Message-ID: Problem has not been observed since. He flow is very stable now. From mtang at snf.stanford.edu Mon Mar 2 09:49:37 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 2 Mar 2009 09:49:37 -0800 Subject: Problem lampoly SNF 2009-01-07 16:56:36: Update Message-ID: From mtang at snf.stanford.edu Mon Mar 2 09:50:06 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 2 Mar 2009 09:50:06 -0800 Subject: Problem lampoly SNF 2008-09-30 15:27:51: Bottom electrode reflected power Message-ID: From mtang at snf.stanford.edu Mon Mar 2 09:50:26 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 2 Mar 2009 09:50:26 -0800 Subject: Comment lampoly SNF 2008-02-19 16:41:03: zero bias for main wafers Message-ID: From mtang at snf.stanford.edu Mon Mar 2 09:50:30 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 2 Mar 2009 09:50:30 -0800 Subject: Comment lampoly SNF 2008-09-04 10:52:55: Qual Sept. 08 Message-ID: From mtang at snf.stanford.edu Mon Mar 2 09:50:39 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 2 Mar 2009 09:50:39 -0800 Subject: Comment lampoly SNF 2008-11-13 18:55:22: Etch rate measurement - Zygo Message-ID: From mtang at snf.stanford.edu Mon Mar 2 09:50:43 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 2 Mar 2009 09:50:43 -0800 Subject: Comment lampoly SNF 2008-11-19 23:06:58: 3 LTO coated dummies in box (courtesy Maurice) Message-ID: From mtang at snf.stanford.edu Mon Mar 2 09:50:55 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 2 Mar 2009 09:50:55 -0800 Subject: Comment lampoly SNF 2008-11-20 17:43:56: Recipe 1 problem Message-ID: From mtang at snf.stanford.edu Mon Mar 2 09:51:02 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 2 Mar 2009 09:51:02 -0800 Subject: Comment lampoly SNF 2009-01-06 17:46:48: Qual results Message-ID: From mtang at snf.stanford.edu Mon Mar 2 09:51:09 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 2 Mar 2009 09:51:09 -0800 Subject: Comment lampoly SNF 2009-01-08 17:47:50: Checked MFC cal and rate of rise Message-ID: From mtang at snf.stanford.edu Mon Mar 2 09:51:48 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 2 Mar 2009 09:51:48 -0800 Subject: Comment lampoly SNF 2009-02-21 15:44:13: too fast etch rate Message-ID: See latest qual. From mtang at snf.stanford.edu Fri Mar 13 16:51:32 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 13 Mar 2009 16:51:32 -0700 Subject: Comment lampoly SNF 2009-03-13 16:51:31: Etch Rate Results Message-ID: Etch rate done: Recipe #1, BT=10", ME=60", OE=30" Silicon etch depth = 5082 A total Uniformity Si etch = 1.3% Selectivity to resist = 3.44 Etch rate a bit on the high side (10% higher than average). But uniformity is very good and selectivity is OK. From mtang at snf.stanford.edu Fri Mar 13 16:51:42 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 13 Mar 2009 16:51:42 -0700 Subject: Comment lampoly SNF 2009-03-13 16:51:31: Etch Rate Results Message-ID: From mtang at snf.stanford.edu Fri Mar 13 16:56:03 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 13 Mar 2009 16:56:03 -0700 Subject: Comment lampoly SNF 2009-03-13 16:56:02: Chiller water fault Message-ID: The chiller failure error pops up and clears itself (error 184.) Mike had checked, but flow and resistivity looked OK. From filip at snf.stanford.edu Sun Mar 15 17:34:29 2009 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Sun, 15 Mar 2009 17:34:29 -0700 Subject: Problem lampoly SNF 2009-03-15 17:34:29: alarm 184 Message-ID: intermittent alarm that the water chiller has failed. After trying to clear it a few times it goes away, but comes back intermittently From cbaxter at snf.stanford.edu Mon Mar 16 16:50:23 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 16 Mar 2009 16:50:23 -0700 Subject: Problem lampoly SNF 2009-03-15 17:34:29: alarm 184 Message-ID: Reset heat exchanger.. From chingmei at snf.stanford.edu Sun Mar 22 10:51:30 2009 From: chingmei at snf.stanford.edu (chingmei at snf.stanford.edu) Date: Sun, 22 Mar 2009 10:51:30 -0700 Subject: Problem lampoly SNF 2009-03-22 10:51:30: water chiller has failed Message-ID: From cbaxter at snf.stanford.edu Sun Mar 22 11:55:48 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 22 Mar 2009 11:55:48 -0700 Subject: Problem lampoly SNF 2009-03-22 10:51:30: water chiller has failed Message-ID: Reset chiller From chingmei at snf.stanford.edu Sun Mar 22 13:07:17 2009 From: chingmei at snf.stanford.edu (chingmei at snf.stanford.edu) Date: Sun, 22 Mar 2009 13:07:17 -0700 Subject: Problem lampoly SNF 2009-03-22 13:07:17: entrance load failed requested rotate action Message-ID: From mtang at snf.stanford.edu Mon Mar 23 10:17:59 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 23 Mar 2009 10:17:59 -0700 Subject: Problem lampoly SNF 2009-03-22 13:07:17: entrance load failed requested rotate action Message-ID: Reinitialized system, OK now. From eenriquez at snf.stanford.edu Mon Mar 23 11:15:21 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 23 Mar 2009 11:15:21 -0700 Subject: Problem lampoly SNF 2009-03-23 11:15:20: Water resistivity too low Message-ID: Water resistivity meter was reading 32 Mohm. Found the resistivity sensor was unplugged. When sensor is plugged in, the reading is 0.8 Mohm. The cause of the low resistivity is that there is no flow to the DI filters. Need to troubleshoot. From eenriquez at snf.stanford.edu Tue Mar 24 11:42:19 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 24 Mar 2009 11:42:19 -0700 Subject: Comment lampoly SNF 2009-03-24 11:42:19: Update water resistivity Message-ID: Found the water line that feeds the DI filter had a plugged-up strainer filter and restricted orifice. Cleaned the filter and restricted orifice. Now the DI filter have good water flow. Will continue to monitor the water flow to the filter. From eenriquez at snf.stanford.edu Wed Mar 25 08:14:36 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Mar 2009 08:14:36 -0700 Subject: Problem lampoly SNF 2009-03-23 11:15:20: Water resistivity too low Message-ID: Found the water line that feeds the DI filter had a plugged-up strainer filter and restricted orifice. Cleaned the filter and restricted orifice. Now the DI filter have good water flow. Will continue to monitor the water flow to the filter. Reconnected the resistivity sensor which now reads 2.0 Mohm. From eenriquez at snf.stanford.edu Wed Mar 25 08:15:23 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Mar 2009 08:15:23 -0700 Subject: Comment lampoly SNF 2009-03-13 16:56:02: Chiller water fault Message-ID: Found the water line that feeds the DI filter had a plugged-up strainer filter and restricted orifice. Cleaned the filter and restricted orifice. Now the DI filter have good water flow. Will continue to monitor the water flow to the filter. Reconnected the resistivity sensor which now reads 2.0 Mohm. From eenriquez at snf.stanford.edu Wed Mar 25 08:15:29 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Mar 2009 08:15:29 -0700 Subject: Comment lampoly SNF 2009-03-24 11:42:19: Update water resistivity Message-ID: Archived From eenriquez at snf.stanford.edu Tue Mar 31 15:06:41 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 31 Mar 2009 15:06:41 -0700 Subject: Comment lampoly SNF 2009-03-31 15:06:41: Installed water filter Message-ID: Installed a wafer filter in the coolant line from the chiller. Flow is 2.2 gpm.