Comment lampoly SNF 2009-03-13 16:51:31: Etch Rate Results

mtang at snf.stanford.edu mtang at snf.stanford.edu
Fri Mar 13 16:51:32 PDT 2009


Etch rate done:
Recipe #1, BT=10", ME=60", OE=30"
Silicon etch depth = 5082 A total
Uniformity Si etch = 1.3%
Selectivity to resist = 3.44
Etch rate a bit on the high side (10% higher than average).
But uniformity is very good and selectivity is OK.




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