March 2009 Archives by thread

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Starting: Mon Mar 2 09:48:47 PST 2009
Ending: Tue Mar 31 15:06:41 PDT 2009
Messages: 26

• Problem lampoly SNF 2008-12-12 14:48:15: Error 209   mtang at snf.stanford.edu
• Problem lampoly SNF 2009-01-07 16:56:36: Update   mtang at snf.stanford.edu
• Problem lampoly SNF 2008-09-30 15:27:51: Bottom electrode reflected power   mtang at snf.stanford.edu
• Comment lampoly SNF 2008-02-19 16:41:03: zero bias for main wafers   mtang at snf.stanford.edu
• Comment lampoly SNF 2008-09-04 10:52:55: Qual Sept. 08   mtang at snf.stanford.edu
• Comment lampoly SNF 2008-11-13 18:55:22: Etch rate measurement - Zygo   mtang at snf.stanford.edu
• Comment lampoly SNF 2008-11-19 23:06:58: 3 LTO coated dummies in box (courtesy Maurice)   mtang at snf.stanford.edu
• Comment lampoly SNF 2008-11-20 17:43:56: Recipe 1 problem   mtang at snf.stanford.edu
• Comment lampoly SNF 2009-01-06 17:46:48: Qual results   mtang at snf.stanford.edu
• Comment lampoly SNF 2009-01-08 17:47:50: Checked MFC cal and rate of rise   mtang at snf.stanford.edu
• Comment lampoly SNF 2009-02-21 15:44:13: too fast etch rate   mtang at snf.stanford.edu
• Comment lampoly SNF 2009-03-13 16:51:31: Etch Rate Results   mtang at snf.stanford.edu
  • Comment lampoly SNF 2009-03-13 16:51:31: Etch Rate Results   mtang at snf.stanford.edu
• Comment lampoly SNF 2009-03-13 16:56:02: Chiller water fault   mtang at snf.stanford.edu
  • Comment lampoly SNF 2009-03-13 16:56:02: Chiller water fault   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2009-03-15 17:34:29: alarm 184   filip at snf.stanford.edu
  • Problem lampoly SNF 2009-03-15 17:34:29: alarm 184   cbaxter at snf.stanford.edu
• Problem lampoly SNF 2009-03-22 10:51:30: water chiller has failed   chingmei at snf.stanford.edu
  • Problem lampoly SNF 2009-03-22 10:51:30: water chiller has failed   cbaxter at snf.stanford.edu
• Problem lampoly SNF 2009-03-22 13:07:17: entrance load failed requested rotate action   chingmei at snf.stanford.edu
  • Problem lampoly SNF 2009-03-22 13:07:17: entrance load failed requested rotate action   mtang at snf.stanford.edu
• Problem lampoly SNF 2009-03-23 11:15:20: Water resistivity too low   eenriquez at snf.stanford.edu
  • Problem lampoly SNF 2009-03-23 11:15:20: Water resistivity too low   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-03-24 11:42:19: Update water resistivity   eenriquez at snf.stanford.edu
  • Comment lampoly SNF 2009-03-24 11:42:19: Update water resistivity   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-03-31 15:06:41: Installed water filter   eenriquez at snf.stanford.edu

Last message date: Tue Mar 31 15:06:41 PDT 2009
Archived on: Sun Dec 23 09:06:11 PST 2012

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