May 2009 Archives by author

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Starting: Sat May 2 19:09:48 PDT 2009
Ending: Sun May 24 08:24:43 PDT 2009
Messages: 27

• Problem lampoly SNF 2009-05-22 17:27:51: Alarm 184: Water chiller failure   ahryciw at snf.stanford.edu
• Comment lampoly SNF 2009-05-04 17:20:03: Broken wafer   cbaxter at snf.stanford.edu
• Problem lampoly SNF 2009-05-04 22:35:47: Wafer Broke   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-05-04 17:20:03: Broken wafer   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-05-06 11:00:18: clamp replaced   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-05-07 14:36:56: Backside He is OK   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-05-06 16:11:42: Wet cleaned the chamber   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2009-05-08 09:32:21: HBr Update   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2009-05-08 09:26:33: No HBr   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-05-13 18:12:55: Needs qual   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-05-14 14:58:17: Backside He updage   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2009-05-06 11:00:18: clamp replaced   mdickey at snf.stanford.edu
• Problem lampoly SNF 2009-05-05 16:38:04: Backside Helium leak?   mtang at snf.stanford.edu
• Shutdown lampoly SNF 2009-05-05 17:16:11: No HBr   mtang at snf.stanford.edu
• Problem lampoly SNF 2009-05-05 16:38:04: Backside Helium leak?   mtang at snf.stanford.edu
• Problem lampoly SNF 2009-05-08 09:26:33: No HBr   mtang at snf.stanford.edu
• Shutdown lampoly SNF 2009-05-05 17:16:11: No HBr   mtang at snf.stanford.edu
• Problem lampoly SNF 2009-05-08 09:32:21: HBr Update   mtang at snf.stanford.edu
• Problem lampoly SNF 2009-05-14 01:53:56: Backside He still problematic   mtang at snf.stanford.edu
• Problem lampoly SNF 2009-04-17 16:18:56: HBr   mtang at snf.stanford.edu
• Comment lampoly SNF 2009-05-14 14:58:17: Backside He updage   mtang at snf.stanford.edu
• Comment lampoly SNF 2009-05-19 15:11:20: Etch Rate   mtang at snf.stanford.edu
• Problem lampoly SNF 2009-05-14 01:53:56: Backside He still problematic   nharjee at snf.stanford.edu
• Problem lampoly SNF 2009-05-04 22:35:47: Wafer Broke   sbasumal at snf.stanford.edu
• Problem lampoly SNF 2009-05-22 17:27:51: Alarm 184: Water chiller failure   shott at snf.stanford.edu
• Comment lampoly SNF 2009-05-02 19:09:47: Couldn't find the quartz wafer for clean recipe #99   tura at snf.stanford.edu
• Comment lampoly SNF 2009-05-22 08:24:05: Clamp ring & Backside He   usha at snf.stanford.edu

Last message date: Sun May 24 08:24:43 PDT 2009
Archived on: Sun Dec 23 09:06:11 PST 2012

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