From cbaxter at snf.stanford.edu Sun Nov 1 12:45:14 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 1 Nov 2009 12:45:14 -0800 Subject: Comment lampoly SNF 2009-11-01 12:45:14: Wet clean Message-ID: Completed chamber wet clean and condition chamber. From cursive at snf.stanford.edu Fri Nov 6 15:06:59 2009 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Fri, 6 Nov 2009 15:06:59 -0800 Subject: Shutdown lampoly SNF 2009-11-06 15:06:59: RF tolerance exceed the tolerance Message-ID: RF tolerance exceed the tolerance durning an RF on Step. From cbaxter at snf.stanford.edu Fri Nov 6 22:58:43 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 6 Nov 2009 22:58:43 -0800 Subject: Shutdown lampoly SNF 2009-11-06 15:06:59: RF tolerance exceed the tolerance Message-ID: I cycled 5 dummy wafers using recipe 99 and could not duplicate the same error. RF is normal at 700 watts forward power relfective is 2 watts. From eenriquez at snf.stanford.edu Thu Nov 12 09:47:30 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 12 Nov 2009 09:47:30 -0800 Subject: Comment lampoly SNF 2009-10-23 09:22:33: Edge Detection Fixed Message-ID: Archived From eenriquez at snf.stanford.edu Thu Nov 12 09:47:40 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 12 Nov 2009 09:47:40 -0800 Subject: Comment lampoly SNF 2009-11-01 12:45:14: Wet clean Message-ID: Archived From mtang at snf.stanford.edu Thu Nov 12 10:18:12 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 12 Nov 2009 10:18:12 -0800 Subject: Comment lampoly SNF 2009-08-28 18:05:21: new dummies Message-ID: From fanpy at snf.stanford.edu Thu Nov 19 16:29:57 2009 From: fanpy at snf.stanford.edu (fanpy at snf.stanford.edu) Date: Thu, 19 Nov 2009 16:29:57 -0800 Subject: Shutdown lampoly SNF 2009-11-19 16:29:56: exit failed Message-ID: Alarm 22: "Exit arm failed requested extension action" Looks like the valve between etching chamber and exit load lock can't close. Three dummies stuck in the machine: one at flat-finder, one in the entrance loadlock and one in the exit loadlock. From eenriquez at snf.stanford.edu Fri Nov 20 10:02:18 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 20 Nov 2009 10:02:18 -0800 Subject: Shutdown lampoly SNF 2009-11-19 16:29:56: exit failed Message-ID: Re-initialized the unload arm. ran 10 wafers using recipe 1 with no problems. From fanpy at snf.stanford.edu Fri Nov 20 11:49:43 2009 From: fanpy at snf.stanford.edu (fanpy at snf.stanford.edu) Date: Fri, 20 Nov 2009 11:49:43 -0800 Subject: Shutdown lampoly SNF 2009-11-20 11:49:42: Same exit problem Message-ID: Same as yesterday. Alarm 22. One of my sample wafers stuck in etching chamber From fanpy at snf.stanford.edu Fri Nov 20 11:51:04 2009 From: fanpy at snf.stanford.edu (fanpy at snf.stanford.edu) Date: Fri, 20 Nov 2009 11:51:04 -0800 Subject: Comment lampoly SNF 2009-11-20 11:51:03: More comments on the problem Message-ID: This time, it looks like it is the door between exit loadlock and receiving cassette that cannot close. From bchui at snf.stanford.edu Fri Nov 20 16:57:01 2009 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Fri, 20 Nov 2009 16:57:01 -0800 Subject: Comment lampoly SNF 2009-11-20 16:57:00: Re: previous user's report Message-ID: I've seen the same problem too. I resolved it once by trying to close the door between the exit LL and the exit cassette by going to the MACRO (?) screen. After a few tries, I succeeded. Seems like the door needs some lubrication or related maintenance. From cbaxter at snf.stanford.edu Fri Nov 20 18:25:14 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 20 Nov 2009 18:25:14 -0800 Subject: Shutdown lampoly SNF 2009-11-20 11:49:42: Same exit problem Message-ID: Repaired air leak on exit outter door and also adjusted close door speed. From cbaxter at snf.stanford.edu Fri Nov 20 18:25:36 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 20 Nov 2009 18:25:36 -0800 Subject: Comment lampoly SNF 2009-11-20 11:51:03: More comments on the problem Message-ID: From cbaxter at snf.stanford.edu Fri Nov 20 18:25:41 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 20 Nov 2009 18:25:41 -0800 Subject: Comment lampoly SNF 2009-11-20 16:57:00: Re: previous user's report Message-ID: From rik at snf.stanford.edu Sat Nov 21 17:33:52 2009 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Sat, 21 Nov 2009 17:33:52 -0800 Subject: Shutdown lampoly SNF 2009-11-21 17:33:51: Error 184 -- Water Chiller failed Message-ID: From eenriquez at snf.stanford.edu Mon Nov 23 14:10:40 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 23 Nov 2009 14:10:40 -0800 Subject: Shutdown lampoly SNF 2009-11-21 17:33:51: Error 184 -- Water Chiller failed Message-ID: Added water to the chiller. Ran 4 wafers with no problems. From rik at snf.stanford.edu Wed Nov 25 19:05:26 2009 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Wed, 25 Nov 2009 19:05:26 -0800 Subject: Problem lampoly SNF 2009-11-25 19:05:25: Turbo pump failure ... Message-ID: From rik at snf.stanford.edu Wed Nov 25 19:09:37 2009 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Wed, 25 Nov 2009 19:09:37 -0800 Subject: Shutdown lampoly SNF 2009-11-25 19:09:36: Wafer stuck in chamber as well Message-ID: Could not clear because of Turbo alarm From mtang at snf.stanford.edu Sat Nov 28 15:02:51 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sat, 28 Nov 2009 15:02:51 -0800 Subject: Shutdown lampoly SNF 2009-11-25 19:09:36: Wafer stuck in chamber as well Message-ID: Turbopump was running slowly and had an error message. Turned it off, then turned it on. Ran up to 600 OK. Removed stuck wafer. Ran a couple of wafers -- looks good. Rishi was running the second wafer on the clean recipe, which is 5 minute. It is possible that the turbo got overloaded (we have a suspected leak in the pump foreline somewhere well below the chamber.) I'm turning it to green, but would ask that anyone running long etches should watch the turbopump rpm. If it starts to drop too low, pause the cycle to allow the turbo to recover. From cbaxter at snf.stanford.edu Sun Nov 29 22:27:07 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 29 Nov 2009 22:27:07 -0800 Subject: Problem lampoly SNF 2009-11-25 19:05:25: Turbo pump failure ... Message-ID: From cursive at snf.stanford.edu Mon Nov 30 12:35:29 2009 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Mon, 30 Nov 2009 12:35:29 -0800 Subject: Problem lampoly SNF 2009-11-30 12:35:29: holder stock at out side cassette Message-ID: Holder send out the wafer, but the holder is stuck at outside casstte. From eenriquez at snf.stanford.edu Mon Nov 30 14:46:31 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 30 Nov 2009 14:46:31 -0800 Subject: Problem lampoly SNF 2009-11-30 12:35:29: holder stock at out side cassette Message-ID: Reset the output cassette indexer. Ran 2 wafers with no problems. From ericp at snf.stanford.edu Mon Nov 30 19:35:07 2009 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Mon, 30 Nov 2009 19:35:07 -0800 Subject: Problem lampoly SNF 2009-11-30 19:35:07: Turbo not reaching speed Message-ID: Turbo drops to 550Hz during run (SP=600Hz). Clearly not good. Recovers somewhat between wafers.