Shutdown lampoly SNF 2009-11-06 15:06:59: RF tolerance exceed the tolerance

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Fri Nov 6 22:58:43 PST 2009


I cycled 5 dummy wafers using recipe 99 and could not duplicate the
same error. RF is normal at 700 watts forward power relfective
is 2 watts.




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