Shutdown lampoly SNF 2009-11-19 16:29:56: exit failed

fanpy at snf.stanford.edu fanpy at snf.stanford.edu
Thu Nov 19 16:29:57 PST 2009


Alarm 22: "Exit arm failed requested extension action"
Looks like the valve between etching chamber and exit load lock can't close.
Three dummies stuck in the machine: one at flat-finder, one in the entrance loadlock and one in the exit loadlock.




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