From fanpy at snf.stanford.edu Fri Oct 2 00:28:56 2009 From: fanpy at snf.stanford.edu (fanpy at snf.stanford.edu) Date: Fri, 2 Oct 2009 00:28:56 -0700 Subject: Shutdown lampoly SNF 2009-10-02 00:28:55: exit and entrance load lock pumpdown fail Message-ID: error 28&40 exit & entrance load lock pumpdown fail. 3 dummies stuck in the tool: one in the etching chamber, one in the entrance load lock, one on the flat finder. From cbaxter at snf.stanford.edu Fri Oct 2 01:29:46 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 2 Oct 2009 01:29:46 -0700 Subject: Shutdown lampoly SNF 2009-10-02 00:28:55: exit and entrance load lock pumpdown fail Message-ID: The entrance outter door did close all the way, the air for the door cylidner popped out, reconnected air line and recovered all 3 dummy wafers. From bchui at snf.stanford.edu Sat Oct 17 17:23:00 2009 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sat, 17 Oct 2009 17:23:00 -0700 Subject: Problem lampoly SNF 2009-10-17 17:22:59: machine frozen Message-ID: there's some binary-code debug info on the top level screen. Machine probably needs a reset. From cbaxter at snf.stanford.edu Sun Oct 18 21:42:36 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 18 Oct 2009 21:42:36 -0700 Subject: Problem lampoly SNF 2009-10-17 17:22:59: machine frozen Message-ID: Reboot system and initialize vat controller. From nvgirish at snf.stanford.edu Thu Oct 22 08:57:43 2009 From: nvgirish at snf.stanford.edu (nvgirish at snf.stanford.edu) Date: Thu, 22 Oct 2009 08:57:43 -0700 Subject: Problem lampoly SNF 2009-10-22 08:57:43: Pumpdown error; lampoly test wafer in load lock Message-ID: Gave error 40 Entrance load lock pumpdown fail, convectron above crossover pressure. From usha at snf.stanford.edu Thu Oct 22 09:21:43 2009 From: usha at snf.stanford.edu (usha at snf.stanford.edu) Date: Thu, 22 Oct 2009 09:21:43 -0700 Subject: Problem lampoly SNF 2009-10-22 09:21:42: Enta\ranse load lock not pumping down Message-ID: Entrance load lock pump down failed. ELL vacuum sense at 5820 - pump failure? From usha at snf.stanford.edu Thu Oct 22 14:58:17 2009 From: usha at snf.stanford.edu (usha at snf.stanford.edu) Date: Thu, 22 Oct 2009 14:58:17 -0700 Subject: Problem lampoly SNF 2009-10-22 14:58:16: Edge detection Message-ID: Edge detection failed. Cold not reset. From usha at snf.stanford.edu Thu Oct 22 14:58:44 2009 From: usha at snf.stanford.edu (usha at snf.stanford.edu) Date: Thu, 22 Oct 2009 14:58:44 -0700 Subject: Shutdown lampoly SNF 2009-10-22 14:58:43: Edge Detection failure Message-ID: From usha at snf.stanford.edu Fri Oct 23 09:22:33 2009 From: usha at snf.stanford.edu (usha at snf.stanford.edu) Date: Fri, 23 Oct 2009 09:22:33 -0700 Subject: Comment lampoly SNF 2009-10-23 09:22:33: Edge Detection Fixed Message-ID: Elmer reinitialized the edge detector and restarted the system. Problem fixed. From eenriquez at snf.stanford.edu Fri Oct 23 09:47:50 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 23 Oct 2009 09:47:50 -0700 Subject: Problem lampoly SNF 2009-10-22 08:57:43: Pumpdown error; lampoly test wafer in load lock Message-ID: Cleaned the LL door oring. From eenriquez at snf.stanford.edu Fri Oct 23 09:47:55 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 23 Oct 2009 09:47:55 -0700 Subject: Problem lampoly SNF 2009-10-22 09:21:42: Enta\ranse load lock not pumping down Message-ID: Cleaned the LL door oring. From eenriquez at snf.stanford.edu Fri Oct 23 09:48:32 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 23 Oct 2009 09:48:32 -0700 Subject: Problem lampoly SNF 2009-10-22 14:58:16: Edge detection Message-ID: Reset the system and re-initialized the edge detector. From eenriquez at snf.stanford.edu Fri Oct 23 09:48:38 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 23 Oct 2009 09:48:38 -0700 Subject: Shutdown lampoly SNF 2009-10-22 14:58:43: Edge Detection failure Message-ID: Reset the system and re-initialized the edge detector. From cursive at snf.stanford.edu Wed Oct 28 16:59:14 2009 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Wed, 28 Oct 2009 16:59:14 -0700 Subject: Shutdown lampoly SNF 2009-10-28 16:59:13: chamber pressure too high Message-ID: Tubo pump problem, chambe pressure too high. Process is abord. wafers are inside. From eenriquez at snf.stanford.edu Wed Oct 28 17:14:44 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 Oct 2009 17:14:44 -0700 Subject: Shutdown lampoly SNF 2009-10-28 16:59:13: chamber pressure too high Message-ID: Cleared the error and resumed process.