Shutdown lampoly SNF 2009-10-02 00:28:55: exit and entrance load lock pumpdown fail

fanpy at snf.stanford.edu fanpy at snf.stanford.edu
Fri Oct 2 00:28:56 PDT 2009


error 28&40
exit & entrance load lock pumpdown fail. 
3 dummies stuck in the tool: one in the etching chamber, one in the entrance load lock, one on the flat finder.




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