Shutdown lampoly SNF 2009-10-02 00:28:55: exit and entrance load lock pumpdown fail

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Fri Oct 2 01:29:46 PDT 2009


The entrance outter door did close all the way, the air for
the door cylidner popped out, reconnected air line and
recovered all 3 dummy wafers.




More information about the lampoly-pcs mailing list