Problem lampoly SNF 2009-10-22 08:57:43: Pumpdown error; lampoly test wafer in load lock

nvgirish at snf.stanford.edu nvgirish at snf.stanford.edu
Thu Oct 22 08:57:43 PDT 2009


Gave error 40
Entrance load lock pumpdown fail, convectron above crossover pressure.




More information about the lampoly-pcs mailing list