Comment lampoly SNF 2010-04-07 18:14:50: pressure deviation

filip at snf.stanford.edu filip at snf.stanford.edu
Wed Apr 7 18:14:50 PDT 2010


in recipe 1, step 3 (BT etch), the pressure varies wildly reaching the hard limit, and thus alarming. This happens to 1 in 5 wafers or so.




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