Problem lampoly SNF 2010-04-12 15:45:24: RF and pressure tolerance problems

rik at snf.stanford.edu rik at snf.stanford.edu
Mon Apr 12 15:45:24 PDT 2010


Got Pressure tolerance problems in BT step at the 7 second mark. The P is oscillating wildly (up to 50mT sometimes!). Changed the BT time to 5 seconds to circumvent the problem temporarily. After a few wafers, got RF tolerance problem. Ran 2 chamber cleans. First one ran fine. Second one errored out with RF tolerance problem again. Maybe the machine needs a wet clean.




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