Comment lampoly SNF 2010-04-13 15:10:30: Update

eenriquez at eenriquez at
Tue Apr 13 15:10:30 PDT 2010

Exit loadlock's inner door has a leak.  Also saw flaky material on some of my test wafers.  Need to wet clean the chamber and repair the door leak.  Started the chamber purge.

More information about the lampoly-pcs mailing list